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  1. 1
    Micro electro discharge milling for microfabrication /
    by Mehfuz, Reyad
    Published 2008
    Subjects: “...Microelectromechanical systems...”
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    Thesis
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  2. 2
    Performance study of MEMS diaphragm for capacitive pressure sensor /
    by Hasyireen Abdul Halim
    Published 2012
    Subjects: “...Microelectromechanical systems....”
    Thesis Book
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  3. 3
    Fabrikasi sensor tekanan kapasitif sangat rendah (STKSR) menggunakan teknologi proses piawai CMOS /
    by Muhammad Ramdzan Buyong
    Published 2010
    Subjects: “...Microelectromechanical systems....”
    Thesis Book
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