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Universiti Malaya.
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Universiti Malaya
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Amorphous semiconductors
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Silicon nitride
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Granting Institution:
Universiti Malaya.
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Universiti Malaya
Suggested Topics:
Amorphous semiconductors
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Silicon nitride
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Amorphous semiconductors
Plasma-enhanced chemical vapor deposition
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Silicon nitride
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Amorphous silicon (a-Si:H)/silicon nitride (a-SiNx:H) superlattice by D.C. plasma enhanced chemical vapour deposition : preparation and characterization /
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Mitani, Sufian Mousa Ibrahim
Published 2004
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Institution
Universiti Malaya
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Mitani, Sufian Mousa Ibrahim
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