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  1. 1
    Silicon self-assembled nanodots fabricated using a radio-frequency magnetron sputtering method
    by Lim, Qiao Jie
    Published 2008
    “... conditions of 5-20 minutes deposition time, 100-400°C substrate temperature and 50-200 W radio-frequency...”
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  2. 2
    Silicon self - assembled nanodots fabricated using a radio - frequency magnetron sputtering method
    by Lim, Qiao Jie
    Published 2008
    “... the varying conditions of 5-20 minutes deposition time, 100-400°C substrate temperature and 50-200 W radio...”
    Get full text
    Thesis
    Save to List
    Saved in:
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