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  1. 1
    A study of some aspects of electron beam lithography /
    by Chor, Eng Fong
    Published 1982
    Subjects: “...Lithography, Electron beam....”
    Thesis Book
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  2. 2
    Fabrication and characterization of submicrometer structures and devices using soft lithography and scanning probe microscopy /
    by Ng, Hou Tee
    Published 2001
    Subjects: “...Lithography, Electron beam....”
    Thesis Book
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