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  1. 1
    Rekabentuk kapasitor boleh laras mems bagi julat 250 fF hingga 1110 fF untuk applikasi RF /
    by Hasnizah Aris
    Published 2006
    Subjects: “...Microelectromechanical systems Design and construction...”
    Thesis Book
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  2. 2
    Akselerometer kapasitif mems 10g pemesinanmikro pukal untuk aplikasi automotif /
    by Azrif Manut
    Published 2007
    Subjects: “...Microelectromechanical systems...”
    Thesis Book
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  3. 3
    Pembangunan akselerometer berdasarkan proses polisilikon epitaksi tebal /
    by Mohd Ismahadi Syono
    Published 2008
    Subjects: “...Microelectromechanical systems...”
    Thesis Book
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  4. 4
    Rekabentuk dan fabrikasi diafram beralun silikon untuk sensor tekanan MEMs /
    by Norhayati Soin
    Published 2006
    Subjects: “...Microelectromechanical systems...”
    Thesis Book
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  5. 5
    Fabrikasi sensor tekanan kapasitif sangat rendah (STKSR) menggunakan teknologi proses piawai CMOS /
    by Muhammad Ramdzan Buyong
    Published 2010
    Subjects: “...Microelectromechanical systems....”
    Thesis Book
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