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  1. 1
    Optimization of inductively coupled plasma dry etching for planar waveguide fabrication /
    by Lim, Weng Hong
    Published 2010
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    Thesis Book
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  2. 2
    Kajian punaran basah tidak isotropik secara eksperimen untuk fabrikasi membran silikon /
    by Mimiwaty Mohd Noor
    Published 2004
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  3. 3
    Laser cleaning of plasma-etch-induced polymers from via holes and other submicron structures on silicon wafers /
    by Lee, Yuan Ping
    Published 1998
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  4. 4
    Plasma charge damage in submicron process /
    by Song, Jun
    Published 1999
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  5. 5
    Inductively coupled plasma dry etching process on planar lightwave circuit fabrication /
    by Chuah, Khoon Seah
    Published 2010
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