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Plasma etching
Etching
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Optimization of inductively coupled plasma dry etching for planar waveguide fabrication /
by
Lim, Weng Hong
Published 2010
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Kajian punaran basah tidak isotropik secara eksperimen untuk fabrikasi membran silikon /
by
Mimiwaty Mohd Noor
Published 2004
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Laser cleaning of plasma-etch-induced polymers from via holes and other submicron structures on silicon wafers /
by
Lee, Yuan Ping
Published 1998
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Plasma charge damage in submicron process /
by
Song, Jun
Published 1999
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Inductively coupled plasma dry etching process on planar lightwave circuit fabrication /
by
Chuah, Khoon Seah
Published 2010
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Institution
Universiti Malaya
4
Universiti Kebangsaan Malaysia
1
Collection
Catalog
5
Author
Chuah, Khoon Seah
1
Lee, Yuan Ping
1
Lim, Weng Hong
1
Mimiwaty Mohd Noor
1
Song, Jun
1
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Universiti Malaya.
2
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English
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Malay
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