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Scanning probe microscopy
Lithography, Electron beam
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Materials characterization and modification with scanning probe techniques /
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Lei, Zhou
Published 1998
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Fabrication and characterization of submicrometer structures and devices using soft lithography and scanning probe microscopy /
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Ng, Hou Tee
Published 2001
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Universiti Malaya
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Lei, Zhou
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Ng, Hou Tee
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