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Hot-wire chemical vapour deposition of silicon carbide thin films from pure silane and methane gases /
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Tehrani, Fatemeh Shariatmadar
Published 2013
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Hot-wire plasma enhanced chemical vapour deposition system for preparation of silicon carbide thin films /
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Aniszawati Azis
Published 2012
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Institution
Universiti Malaya
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Aniszawati Azis
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Tehrani, Fatemeh Shariatmadar
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