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  1. 1
    Layer-by-layer plasma enhanced chemical vapour deposition of nanocrystalline silicon thin films /
    by Goh, Boon Tong
    Published 2012
    Subjects: “...Thin films Design and construction....”
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    Thesis Book
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  2. 2
    Hybrid Plasma Enhanced Chemical Vapour Deposition/sputtering system for preparation of luminescent silicon carbon films /
    by Nur Maisarah Abdul Rashid
    Published 2013
    Subjects: “...Thin films Design and construction...”
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