Characterization Of SEM Charging Effects

The research has demonstrated the potential for charging effect identification. Then the dynamic range compensation technique helps to further improve the charging image quality. This achievement is definitely useful for SEM applications.

Saved in:
Bibliographic Details
Main Author: Tan, Yik Yee
Format: Thesis
Published: 2007
Subjects:
Tags: Add Tag
No Tags, Be the first to tag this record!