Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films

Ruthenium (Ru) is one of the noble air-stable transition metals, which has excellent thermal chemical stability, low electrical resistivity, and relatively high work function near the valence band edge of Si. Recently, Ru has been introduced into the semiconductor industries as a result of the inter...

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Bibliographic Details
Main Author: Lee , Wai Keat
Format: Thesis
Published: 2010
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