Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films
Ruthenium (Ru) is one of the noble air-stable transition metals, which has excellent thermal chemical stability, low electrical resistivity, and relatively high work function near the valence band edge of Si. Recently, Ru has been introduced into the semiconductor industries as a result of the inter...
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my-mmu-ep.34112012-03-23T04:16:28Z Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films 2010-07 Lee , Wai Keat TA Engineering (General). Civil engineering (General) Ruthenium (Ru) is one of the noble air-stable transition metals, which has excellent thermal chemical stability, low electrical resistivity, and relatively high work function near the valence band edge of Si. Recently, Ru has been introduced into the semiconductor industries as a result of the interesting chemical, physical, and electrical properties it possessed. 2010-07 Thesis http://shdl.mmu.edu.my/3411/ http://vlib.mmu.edu.my/diglib/login/dlusr/login.php masters University of Multimedia Research Library |
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TA Engineering (General) Civil engineering (General) |
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TA Engineering (General) Civil engineering (General) Lee , Wai Keat Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films |
| description |
Ruthenium (Ru) is one of the noble air-stable transition metals, which has excellent thermal chemical stability, low electrical resistivity, and relatively high work function near the valence band edge of Si. Recently, Ru has been introduced into the semiconductor industries as a result of the interesting chemical, physical, and electrical properties it possessed. |
| format |
Thesis |
| qualification_level |
Master's degree |
| author |
Lee , Wai Keat |
| author_facet |
Lee , Wai Keat |
| author_sort |
Lee , Wai Keat |
| title |
Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films |
| title_short |
Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films |
| title_full |
Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films |
| title_fullStr |
Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films |
| title_full_unstemmed |
Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films |
| title_sort |
pulsed nd:yag laser deposition of ruthenium thin films |
| granting_institution |
University of Multimedia |
| granting_department |
Research Library |
| publishDate |
2010 |
| _version_ |
1747829491532562432 |