Pulsed Nd:YAG Laser Deposition Of Ruthenium Thin Films
Ruthenium (Ru) is one of the noble air-stable transition metals, which has excellent thermal chemical stability, low electrical resistivity, and relatively high work function near the valence band edge of Si. Recently, Ru has been introduced into the semiconductor industries as a result of the inter...
Saved in:
| 主要作者: | |
|---|---|
| 格式: | Thesis |
| 出版: |
2010
|
| 主题: | |
| 标签: |
添加标签
没有标签, 成为第一个标记此记录!
|