Nitrogen doping of amorphous carbon thin film prepared by camphor using thermal CVD / Arina Yusof
This research investigates on the nitrogen doping of amorphous carbon thin film that have been prepared by camphor using thermal CVD method at different temperature. This research used argon (Ar), camphor oil and nitrogen (N) as carrier source and dopant gases, respectively. The effect of nitrogen...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
2010
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| Subjects: | |
| Online Access: | https://ir.uitm.edu.my/id/eprint/103046/1/103046.pdf |
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