Characterization of nanostructured zinc oxide thin films for ammonia gas sensor / Samsiah Ahmad

This research is carried out to deposit and characterizes nanostructured Zinc Oxide (ZnO) thin film by radio frequency (RF) magnetron sputtering method for ammonia (NH3) gas sensor application. The sensitivity of sensor is mainly depends on the surface reaction effect which strongly depends on the g...

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Bibliographic Details
Main Author: Ahmad, Samsiah
Format: Thesis
Language:English
Published: 2013
Subjects:
Online Access:https://ir.uitm.edu.my/id/eprint/48557/1/48557.pdf
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