Thermal response of silicon during virtual laser micromachining
This project presents thermal response of silicon during virtual laser micromachining based on finite element method. Predictable models were developed using ALGOR FE code to simulate laser micromachining and to predict temperature distribution in silicon due to laser material interaction. Two FE mo...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
2009
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| Subjects: | |
| Online Access: | http://umpir.ump.edu.my/id/eprint/16988/25/Thermal%20response%20of%20silicon%20during%20virtual%20laser%20micromachining.pdf |
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