Thermal response of silicon during virtual laser micromachining

This project presents thermal response of silicon during virtual laser micromachining based on finite element method. Predictable models were developed using ALGOR FE code to simulate laser micromachining and to predict temperature distribution in silicon due to laser material interaction. Two FE mo...

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Bibliographic Details
Main Author:	Muhammad Hasri, Ibrahim
Format:	Thesis
Language:	English
Published:	2009
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://umpir.ump.edu.my/id/eprint/16988/25/Thermal%20response%20of%20silicon%20during%20virtual%20laser%20micromachining.pdf
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id	my-ump-ir.16988
record_format	uketd_dc
spelling	my-ump-ir.169882021-12-07T02:19:56Z Thermal response of silicon during virtual laser micromachining 2009 Muhammad Hasri, Ibrahim TJ Mechanical engineering and machinery This project presents thermal response of silicon during virtual laser micromachining based on finite element method. Predictable models were developed using ALGOR FE code to simulate laser micromachining and to predict temperature distribution in silicon due to laser material interaction. Two FE models, linear and circular cutting were developed. Thermal properties of silicon were taken from literature. Time dependent heat flux was defined at each node along cutting line, laser velocity was designed by model distance and time interval. Transient heat transfer analysis was used to simulate laser micromachining. Process parameters considered were laser power, velocity and plasma gas effect. Total of 28 simulations were done. The FE model was validated from published report. Results qualitatively were found to be agreeable. Crucial factors are found to be pulse energy and moving velocity in reducing thermal cracks and thermal debris. This virtual work can significantly reduce the cost and time for process development in industry, and improve product reliability. 2009 Thesis http://umpir.ump.edu.my/id/eprint/16988/ http://umpir.ump.edu.my/id/eprint/16988/25/Thermal%20response%20of%20silicon%20during%20virtual%20laser%20micromachining.pdf pdf en public engd doctoral Universiti Malaysia Pahang Faculty of Mechanical Engineering
institution	Universiti Malaysia Pahang Al-Sultan Abdullah
collection	UMPSA Institutional Repository
language	English
topic	TJ Mechanical engineering and machinery
spellingShingle	TJ Mechanical engineering and machinery Muhammad Hasri, Ibrahim Thermal response of silicon during virtual laser micromachining
description	This project presents thermal response of silicon during virtual laser micromachining based on finite element method. Predictable models were developed using ALGOR FE code to simulate laser micromachining and to predict temperature distribution in silicon due to laser material interaction. Two FE models, linear and circular cutting were developed. Thermal properties of silicon were taken from literature. Time dependent heat flux was defined at each node along cutting line, laser velocity was designed by model distance and time interval. Transient heat transfer analysis was used to simulate laser micromachining. Process parameters considered were laser power, velocity and plasma gas effect. Total of 28 simulations were done. The FE model was validated from published report. Results qualitatively were found to be agreeable. Crucial factors are found to be pulse energy and moving velocity in reducing thermal cracks and thermal debris. This virtual work can significantly reduce the cost and time for process development in industry, and improve product reliability.
format	Thesis
qualification_name	engd
qualification_level	Doctorate
author	Muhammad Hasri, Ibrahim
author_facet	Muhammad Hasri, Ibrahim
author_sort	Muhammad Hasri, Ibrahim
title	Thermal response of silicon during virtual laser micromachining
title_short	Thermal response of silicon during virtual laser micromachining
title_full	Thermal response of silicon during virtual laser micromachining
title_fullStr	Thermal response of silicon during virtual laser micromachining
title_full_unstemmed	Thermal response of silicon during virtual laser micromachining
title_sort	thermal response of silicon during virtual laser micromachining
granting_institution	Universiti Malaysia Pahang
granting_department	Faculty of Mechanical Engineering
publishDate	2009
url	http://umpir.ump.edu.my/id/eprint/16988/25/Thermal%20response%20of%20silicon%20during%20virtual%20laser%20micromachining.pdf
_version_	1783732019585351680

Thermal response of silicon during virtual laser micromachining

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