Fabrication and characterization of microfluidic field effect transistor on silicon substrate
The development of a silicon-based microfluidic field effect transistor has been carried out. The main objective of this study is to present from concept, the design of a microfluidic FET and to develop its appropriate process flow in fabricating the microfluidic FET on silicon wafer, which will...
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| Format: | Thesis |
| Language: | English |
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| Online Access: | http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/12923/1/p.%201-24.pdf http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/12923/2/Full%20Text.pdf |
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