Surface roughness and wettability investigation of varied plasma parameter effect on PVD deposited aluminium

Surface metrology has been a focused and thoroughly investigated research niche since the advent of device fabrication. The current technology shift into MEMS and nano has again made surface metrology a focused area. Layer adhesion and bonding have surface metrology importance here. In this work, su...

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Bibliographic Details
Main Author: Moganraj, Palianysamy
Format: Thesis
Language:English
Subjects:
Online Access:http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/31159/1/Page%201-24.pdf
http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/31159/2/Full%20text.pdf
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