Surface roughness and wettability investigation of varied plasma parameter effect on PVD deposited aluminium

Surface roughness and wettability investigation of varied plasma parameter effect on PVD deposited aluminium

Surface metrology has been a focused and thoroughly investigated research niche since the advent of device fabrication. The current technology shift into MEMS and nano has again made surface metrology a focused area. Layer adhesion and bonding have surface metrology importance here. In this work, su...

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书目详细资料
主要作者:	Moganraj, Palianysamy
格式:	Thesis
语言:	English
主题:	Microelectronic engineering Surface roughness Surface metrology Aluminium deposition Surface Wettability Physical Vapor Deposition (PVD)
在线阅读:	http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/31159/1/Page%201-24.pdf http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/31159/2/Full%20text.pdf
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