Finite element (quasi-static) model of electrostatic microelectromechanical cantilever
A finite element model has been developed to enable an initial assessment of the analysis of an elastic-electrostatic system of an electrostatic micromechanical cantilever (which is often referred to simply as a cantilever) for microelectromechanical systems (MEMS) design performance and evaluation....
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| Format: | Thesis |
| Language: | English |
| Published: |
2009
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| Online Access: | http://ir.unimas.my/id/eprint/232/9/Finite%20element%20%28quasi-static%29%20model%20of%20electrostatic%20microelectromechanical%20cantilever%20%28fulltext%29.pdf |
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