Finite element (quasi-static) model of electrostatic microelectromechanical cantilever

A finite element model has been developed to enable an initial assessment of the analysis of an elastic-electrostatic system of an electrostatic micromechanical cantilever (which is often referred to simply as a cantilever) for microelectromechanical systems (MEMS) design performance and evaluation....

Full description

Saved in:

Bibliographic Details
Main Author:	Lai, Adriana Mook Kim
Format:	Thesis
Language:	English
Published:	2009
Subjects:	TA Engineering (General) Civil engineering (General)
Online Access:	http://ir.unimas.my/id/eprint/232/9/Finite%20element%20%28quasi-static%29%20model%20of%20electrostatic%20microelectromechanical%20cantilever%20%28fulltext%29.pdf
Tags:	Add Tag No Tags, Be the first to tag this record!

id	my-unimas-ir.232
record_format	uketd_dc
spelling	my-unimas-ir.2322023-03-06T09:28:30Z Finite element (quasi-static) model of electrostatic microelectromechanical cantilever 2009 Lai, Adriana Mook Kim TA Engineering (General). Civil engineering (General) A finite element model has been developed to enable an initial assessment of the analysis of an elastic-electrostatic system of an electrostatic micromechanical cantilever (which is often referred to simply as a cantilever) for microelectromechanical systems (MEMS) design performance and evaluation. The model comprised of an electrostatic and a mechanical solver. The electrostatic solver derived the electrostatic force on the cantilever from the potential difference applied between the cantilever and a fixed reference plate. The force is then fed to the mechanical solver that computed the deformation of the cantilever. Solutions to the solvers were attained interatively. It was assumed that the system was in quasi-static equilibrium for each interative step, as the time taken for redistribution of electric charges on the surface of the cantilever was much shorter in comparison of the mechanical reaction time of the cantilever. Universiti Malaysia Sarawak, UNIMAS 2009 Thesis http://ir.unimas.my/id/eprint/232/ http://ir.unimas.my/id/eprint/232/9/Finite%20element%20%28quasi-static%29%20model%20of%20electrostatic%20microelectromechanical%20cantilever%20%28fulltext%29.pdf text en validuser masters Universiti Malaysia Sarawak (UNIMAS) Faculty of Engineering
institution	Universiti Malaysia Sarawak
collection	UNIMAS Institutional Repository
language	English
topic	TA Engineering (General) Civil engineering (General)
spellingShingle	TA Engineering (General) Civil engineering (General) Lai, Adriana Mook Kim Finite element (quasi-static) model of electrostatic microelectromechanical cantilever
description	A finite element model has been developed to enable an initial assessment of the analysis of an elastic-electrostatic system of an electrostatic micromechanical cantilever (which is often referred to simply as a cantilever) for microelectromechanical systems (MEMS) design performance and evaluation. The model comprised of an electrostatic and a mechanical solver. The electrostatic solver derived the electrostatic force on the cantilever from the potential difference applied between the cantilever and a fixed reference plate. The force is then fed to the mechanical solver that computed the deformation of the cantilever. Solutions to the solvers were attained interatively. It was assumed that the system was in quasi-static equilibrium for each interative step, as the time taken for redistribution of electric charges on the surface of the cantilever was much shorter in comparison of the mechanical reaction time of the cantilever.
format	Thesis
qualification_level	Master's degree
author	Lai, Adriana Mook Kim
author_facet	Lai, Adriana Mook Kim
author_sort	Lai, Adriana Mook Kim
title	Finite element (quasi-static) model of electrostatic microelectromechanical cantilever
title_short	Finite element (quasi-static) model of electrostatic microelectromechanical cantilever
title_full	Finite element (quasi-static) model of electrostatic microelectromechanical cantilever
title_fullStr	Finite element (quasi-static) model of electrostatic microelectromechanical cantilever
title_full_unstemmed	Finite element (quasi-static) model of electrostatic microelectromechanical cantilever
title_sort	finite element (quasi-static) model of electrostatic microelectromechanical cantilever
granting_institution	Universiti Malaysia Sarawak (UNIMAS)
granting_department	Faculty of Engineering
publishDate	2009
url	http://ir.unimas.my/id/eprint/232/9/Finite%20element%20%28quasi-static%29%20model%20of%20electrostatic%20microelectromechanical%20cantilever%20%28fulltext%29.pdf
_version_	1783727872679084032

Finite element (quasi-static) model of electrostatic microelectromechanical cantilever

Similar Items