Development Of Spacer Free Self-Aligned Contact Implantation For Power Devices
Mengoptimasi skema proses integrasi bagi sesebuah teknolgi merupakan salah satu faktor penting untuk mengurangkan bilangan kecatatan dan kitaran masa dalam bidang fabrikasi wafer. Dalam pengajian sarjana ini, aliran proses yang dioptimasi bagi menjajarkan penimpalan kontak telah dikaji bagi teknolog...
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Main Author: | Poobalan, Banu |
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Format: | Thesis |
Language: | English |
Published: |
2009
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Subjects: | |
Online Access: | http://eprints.usm.my/41784/1/Banu_AP_Poobalan24.pdf |
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