Fabrication And Physical Characterisation Of Zinc Oxide Thin Films

Zinc oxide (ZnO) thin films were deposited on α-0001 sapphire substrates using direct current (d.c.) magnetron sputtering process and annealed at various temperatures in an inert atmosphere to investigate its effect on the ultraviolet (UV) emission, stress, lattice constants, crystallite size as wel...

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Bibliographic Details
Main Author: Lim , Yam Tee
Format: Thesis
Language:English
Published: 2012
Subjects:
Online Access:http://eprints.usm.my/41953/1/LIM_YAM_TEE.pdf
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