Fabrication And Characterizations Of Magnetron Co-Sputtered InAIN Films For Photodetectors Application

In this work, growth of indium aluminum nitride (InAlN) film was studied on different substrates by using reactive magnetron co-sputtering technique. The study was mainly focused to grow In-rich InAlN film on p-type Si (111) substrate with improved physical properties. The structural properties of I...

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Bibliographic Details
Main Author: Afzal, Naveed
Format: Thesis
Published: 2017
Online Access:http://eprints.usm.my/45432/1/NAVEED%20AFZAL.pdf
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