Fabrication And Characterizations Of Magnetron Co-Sputtered InAIN Films For Photodetectors Application

In this work, growth of indium aluminum nitride (InAlN) film was studied on different substrates by using reactive magnetron co-sputtering technique. The study was mainly focused to grow In-rich InAlN film on p-type Si (111) substrate with improved physical properties. The structural properties of I...

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Main Author: Afzal, Naveed
Format: Thesis
Language:English
Published: 2017
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Online Access:http://eprints.usm.my/45432/1/NAVEED%20AFZAL.pdf
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spelling my-usm-ep.454322019-09-17T02:42:07Z Fabrication And Characterizations Of Magnetron Co-Sputtered InAIN Films For Photodetectors Application 2017-02 Afzal, Naveed QC1-999 Physics In this work, growth of indium aluminum nitride (InAlN) film was studied on different substrates by using reactive magnetron co-sputtering technique. The study was mainly focused to grow In-rich InAlN film on p-type Si (111) substrate with improved physical properties. The structural properties of InAlN were investigated through X-ray diffraction (XRD) analysis, surface properties were studied through field emission scanning electron microscopy (FESEM) and atomic force microscopy (AFM) whereas the electrical properties were examined by taking Hall measurements and current-voltage (I-V) characteristics of the films. The band gap of InAlN was estimated through UV-Vis reflectance spectroscopy. 2017-02 Thesis http://eprints.usm.my/45432/ http://eprints.usm.my/45432/1/NAVEED%20AFZAL.pdf application/pdf en public phd doctoral Universiti Sains Malaysia Pusat Pengajian Sains Fizik
institution Universiti Sains Malaysia
collection USM Institutional Repository
language English
topic QC1-999 Physics
spellingShingle QC1-999 Physics
Afzal, Naveed
Fabrication And Characterizations Of Magnetron Co-Sputtered InAIN Films For Photodetectors Application
description In this work, growth of indium aluminum nitride (InAlN) film was studied on different substrates by using reactive magnetron co-sputtering technique. The study was mainly focused to grow In-rich InAlN film on p-type Si (111) substrate with improved physical properties. The structural properties of InAlN were investigated through X-ray diffraction (XRD) analysis, surface properties were studied through field emission scanning electron microscopy (FESEM) and atomic force microscopy (AFM) whereas the electrical properties were examined by taking Hall measurements and current-voltage (I-V) characteristics of the films. The band gap of InAlN was estimated through UV-Vis reflectance spectroscopy.
format Thesis
qualification_name Doctor of Philosophy (PhD.)
qualification_level Doctorate
author Afzal, Naveed
author_facet Afzal, Naveed
author_sort Afzal, Naveed
title Fabrication And Characterizations Of Magnetron Co-Sputtered InAIN Films For Photodetectors Application
title_short Fabrication And Characterizations Of Magnetron Co-Sputtered InAIN Films For Photodetectors Application
title_full Fabrication And Characterizations Of Magnetron Co-Sputtered InAIN Films For Photodetectors Application
title_fullStr Fabrication And Characterizations Of Magnetron Co-Sputtered InAIN Films For Photodetectors Application
title_full_unstemmed Fabrication And Characterizations Of Magnetron Co-Sputtered InAIN Films For Photodetectors Application
title_sort fabrication and characterizations of magnetron co-sputtered inain films for photodetectors application
granting_institution Universiti Sains Malaysia
granting_department Pusat Pengajian Sains Fizik
publishDate 2017
url http://eprints.usm.my/45432/1/NAVEED%20AFZAL.pdf
_version_ 1747821510109691904