Fabrication, Characterization And Humidity Sensing Properties Of Radio Frequency Magnetron Sputtered Calcium Copper Titanate (CCTO) Thin Film.
Resistance-type humidity sensor based on CCTO thin films which are capable of sensing of humidity in the range of 30%-90% and short period of time have been successfully fabricated by using radio frequency (RF) magnetron sputtering technique. The CCTO thin film humidity sensor based-on resistance me...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
2018
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| Online Access: | http://eprints.usm.my/56071/1/Fabrication%2C%20Characterization%20And%20Humidity%20Sensing%20Properties%20Of%20Radio%20Frequency%20Magnetron%20Sputtered%20Calcium%20Copper%20Titanate%20%28CCTO%29%20Thin%20Film_Mohsen%20Ahmadipour.pdf |
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