Fabrication, Characterization And Humidity Sensing Properties Of Radio Frequency Magnetron Sputtered Calcium Copper Titanate (CCTO) Thin Film.

Resistance-type humidity sensor based on CCTO thin films which are capable of sensing of humidity in the range of 30%-90% and short period of time have been successfully fabricated by using radio frequency (RF) magnetron sputtering technique. The CCTO thin film humidity sensor based-on resistance me...

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Main Author:	Ahmadipour, Mohsen
Format:	Thesis
Language:	English
Published:	2018
Subjects:	T Technology
Online Access:	http://eprints.usm.my/56071/1/Fabrication%2C%20Characterization%20And%20Humidity%20Sensing%20Properties%20Of%20Radio%20Frequency%20Magnetron%20Sputtered%20Calcium%20Copper%20Titanate%20%28CCTO%29%20Thin%20Film_Mohsen%20Ahmadipour.pdf
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spelling	my-usm-ep.560712022-12-21T06:09:31Z Fabrication, Characterization And Humidity Sensing Properties Of Radio Frequency Magnetron Sputtered Calcium Copper Titanate (CCTO) Thin Film. 2018-07-01 Ahmadipour, Mohsen T Technology TN Mining Engineering. Metallurgy Resistance-type humidity sensor based on CCTO thin films which are capable of sensing of humidity in the range of 30%-90% and short period of time have been successfully fabricated by using radio frequency (RF) magnetron sputtering technique. The CCTO thin film humidity sensor based-on resistance measurement has never been reported before. The aim of this study is to fabricate a humidity sensor with small size and simple structure in order to reduce the fabrication cost, to enhance of CCTO thin film humidity sensing properties, and finally to prove the great potential of CCTO as a humidity sensing application. CCTO thin film with 200 nm, 400 nm, and 600 nm thicknesses were deposited on alumina (Al2O3) substrates, respectively and physically analyzed by field emission scanning electron microscopy which is connected with energy dispersive X-ray spectroscopy (FESEM-EDAX), X ray diffraction (XRD) and atomic force microscopy (AFM) in order to understand their microstructure and morphology. Prior to CCTO deposition, the fabrication process was assisted by thermal evaporator to prepare the highly conductive interdigitated silver electrode. The CCTO thin film humidity sensor electrically tested in different relative humidity (RH) (30% to 90%) at ambient temperature. Results exhibited that resistance of all samples decreased with increasing the CCTO thin film thickness and also upon exposure to humidity. In addition, a quick response time i.e., approximately less than 1 min was observed for both CCTO thin films. For device based on 200 nm CCTO thin film, high humidity sensing properties (Response time = 10 s, Recovery time = 450 s, Sensitivity = 75.6 %) was observed upon exposure to humidity. When the measurements were repeated after a month, the CCTO thin film showed remarkable stability. The possible mechanism between humidity and CCTO thin film was proposed whereby the humidity sensing process is correlated to adsorption and desorption water on the films surface at low RH, water molecule will not cover the surface completely and can only chemisorb on the available site of the CCTO surface. Furthermore, water adsorbing will not provide electrons to sensing layers and will significantly lower the sensing properties of CCTO thin film humidity sensor. At high RH, the larger content of water is adsorbed, so the density of charge carrier becomes higher and hence the sensing properties increases. Thus, the performance of the CCTO thin film electrical properties achieved the requirement for good humidity sensor. Moreover, its ability to detect relative humidity in range 30%-90% qualified this CCTO thin film as a very promising potential to be applied as a practical and high performance humidity sensor in the near future. 2018-07 Thesis http://eprints.usm.my/56071/ http://eprints.usm.my/56071/1/Fabrication%2C%20Characterization%20And%20Humidity%20Sensing%20Properties%20Of%20Radio%20Frequency%20Magnetron%20Sputtered%20Calcium%20Copper%20Titanate%20%28CCTO%29%20Thin%20Film_Mohsen%20Ahmadipour.pdf application/pdf en public phd doctoral Universiti Sains Malaysia Pusat Pengajian Kejuruteraan Bahan dan Sumber Mineral
institution	Universiti Sains Malaysia
collection	USM Institutional Repository
language	English
topic	T Technology T Technology
spellingShingle	T Technology T Technology Ahmadipour, Mohsen Fabrication, Characterization And Humidity Sensing Properties Of Radio Frequency Magnetron Sputtered Calcium Copper Titanate (CCTO) Thin Film.
description	Resistance-type humidity sensor based on CCTO thin films which are capable of sensing of humidity in the range of 30%-90% and short period of time have been successfully fabricated by using radio frequency (RF) magnetron sputtering technique. The CCTO thin film humidity sensor based-on resistance measurement has never been reported before. The aim of this study is to fabricate a humidity sensor with small size and simple structure in order to reduce the fabrication cost, to enhance of CCTO thin film humidity sensing properties, and finally to prove the great potential of CCTO as a humidity sensing application. CCTO thin film with 200 nm, 400 nm, and 600 nm thicknesses were deposited on alumina (Al2O3) substrates, respectively and physically analyzed by field emission scanning electron microscopy which is connected with energy dispersive X-ray spectroscopy (FESEM-EDAX), X ray diffraction (XRD) and atomic force microscopy (AFM) in order to understand their microstructure and morphology. Prior to CCTO deposition, the fabrication process was assisted by thermal evaporator to prepare the highly conductive interdigitated silver electrode. The CCTO thin film humidity sensor electrically tested in different relative humidity (RH) (30% to 90%) at ambient temperature. Results exhibited that resistance of all samples decreased with increasing the CCTO thin film thickness and also upon exposure to humidity. In addition, a quick response time i.e., approximately less than 1 min was observed for both CCTO thin films. For device based on 200 nm CCTO thin film, high humidity sensing properties (Response time = 10 s, Recovery time = 450 s, Sensitivity = 75.6 %) was observed upon exposure to humidity. When the measurements were repeated after a month, the CCTO thin film showed remarkable stability. The possible mechanism between humidity and CCTO thin film was proposed whereby the humidity sensing process is correlated to adsorption and desorption water on the films surface at low RH, water molecule will not cover the surface completely and can only chemisorb on the available site of the CCTO surface. Furthermore, water adsorbing will not provide electrons to sensing layers and will significantly lower the sensing properties of CCTO thin film humidity sensor. At high RH, the larger content of water is adsorbed, so the density of charge carrier becomes higher and hence the sensing properties increases. Thus, the performance of the CCTO thin film electrical properties achieved the requirement for good humidity sensor. Moreover, its ability to detect relative humidity in range 30%-90% qualified this CCTO thin film as a very promising potential to be applied as a practical and high performance humidity sensor in the near future.
format	Thesis
qualification_name	Doctor of Philosophy (PhD.)
qualification_level	Doctorate
author	Ahmadipour, Mohsen
author_facet	Ahmadipour, Mohsen
author_sort	Ahmadipour, Mohsen
title	Fabrication, Characterization And Humidity Sensing Properties Of Radio Frequency Magnetron Sputtered Calcium Copper Titanate (CCTO) Thin Film.
title_short	Fabrication, Characterization And Humidity Sensing Properties Of Radio Frequency Magnetron Sputtered Calcium Copper Titanate (CCTO) Thin Film.
title_full	Fabrication, Characterization And Humidity Sensing Properties Of Radio Frequency Magnetron Sputtered Calcium Copper Titanate (CCTO) Thin Film.
title_fullStr	Fabrication, Characterization And Humidity Sensing Properties Of Radio Frequency Magnetron Sputtered Calcium Copper Titanate (CCTO) Thin Film.
title_full_unstemmed	Fabrication, Characterization And Humidity Sensing Properties Of Radio Frequency Magnetron Sputtered Calcium Copper Titanate (CCTO) Thin Film.
title_sort	fabrication, characterization and humidity sensing properties of radio frequency magnetron sputtered calcium copper titanate (ccto) thin film.
granting_institution	Universiti Sains Malaysia
granting_department	Pusat Pengajian Kejuruteraan Bahan dan Sumber Mineral
publishDate	2018
url	http://eprints.usm.my/56071/1/Fabrication%2C%20Characterization%20And%20Humidity%20Sensing%20Properties%20Of%20Radio%20Frequency%20Magnetron%20Sputtered%20Calcium%20Copper%20Titanate%20%28CCTO%29%20Thin%20Film_Mohsen%20Ahmadipour.pdf
_version_	1776101128886288384

Fabrication, Characterization And Humidity Sensing Properties Of Radio Frequency Magnetron Sputtered Calcium Copper Titanate (CCTO) Thin Film.

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