Smart control sampling system for metrology tool in semiconductor production line
This research is to implement a Smart Control Sampling (SCS) system for metrology tool in the Semiconductor industry factory for better traceability and dynamic control on quality sampling for wire bond proces. Wire Bond process is one of the most critical process in the overall assembly line whereb...
Saved in:
| 主要作者: | |
|---|---|
| 格式: | Thesis |
| 語言: | English English |
| 出版: |
2021
|
| 主題: | |
| 在線閱讀: | http://eprints.utem.edu.my/id/eprint/26661/1/Smart%20control%20sampling%20system%20for%20metrology%20tool%20in%20semiconductor%20production%20line.pdf http://eprints.utem.edu.my/id/eprint/26661/2/Smart%20control%20sampling%20system%20for%20metrology%20tool%20in%20semiconductor%20production%20line.pdf |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|
因特網
http://eprints.utem.edu.my/id/eprint/26661/1/Smart%20control%20sampling%20system%20for%20metrology%20tool%20in%20semiconductor%20production%20line.pdfhttp://eprints.utem.edu.my/id/eprint/26661/2/Smart%20control%20sampling%20system%20for%20metrology%20tool%20in%20semiconductor%20production%20line.pdf