Development of three-dimensional (3D) grayscale Photolithography process for microfluidic curvature Structures
Three-dimensional (3D) microstructures can enhance the optical, electrical and mechanical properties of the microfluidic system. However, the 3D microfabrication is challenging when simultaneous control over fabrication of lateral and vertical dimensions is required. To achieve such control, g...
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| Format: | Thesis |
| Language: | English |
| Published: |
2018
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| Online Access: | http://eprints.uthm.edu.my/695/1/24p%20INTAN%20SUE%20LIANA%20ABDUL%20HAMID.pdf |
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