Development of three-dimensional (3D) grayscale Photolithography process for microfluidic curvature Structures

Three-dimensional (3D) microstructures can enhance the optical, electrical and mechanical properties of the microfluidic system. However, the 3D microfabrication is challenging when simultaneous control over fabrication of lateral and vertical dimensions is required. To achieve such control, g...

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Bibliographic Details
Main Author: Abdul Hamid, Intan Sue Liana
Format: Thesis
Published: 2018
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