Development of three-dimensional (3D) grayscale Photolithography process for microfluidic curvature Structures

Three-dimensional (3D) microstructures can enhance the optical, electrical and mechanical properties of the microfluidic system. However, the 3D microfabrication is challenging when simultaneous control over fabrication of lateral and vertical dimensions is required. To achieve such control, g...

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Main Author:	Abdul Hamid, Intan Sue Liana
Format:	Thesis
Language:	English
Published:	2018
Subjects:	TJ1125-1345 Machine shops and machine shop practice
Online Access:	http://eprints.uthm.edu.my/695/1/24p%20INTAN%20SUE%20LIANA%20ABDUL%20HAMID.pdf
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spelling	my-uthm-ep.6952021-08-30T03:06:40Z Development of three-dimensional (3D) grayscale Photolithography process for microfluidic curvature Structures 2018-11 Abdul Hamid, Intan Sue Liana TJ1125-1345 Machine shops and machine shop practice Three-dimensional (3D) microstructures can enhance the optical, electrical and mechanical properties of the microfluidic system. However, the 3D microfabrication is challenging when simultaneous control over fabrication of lateral and vertical dimensions is required. To achieve such control, grayscale photolithography technique has been comprehensively studied as an alternative to the current 3D microfabrication technique. Current techniques require highly sophisticated and PTTA expensive equipments, with slow point-to-point or layer-by-layer approach of pattern exposure. The proposed grayscale photolithography technique in this research has been used in realization of microstructures with height between 163.8 µm and 1108.7 µm in a single exposure through grayscale photomask. The grayscale photolithography technique developed in this study has been applied for realization of 3D microstructures in fiber optic-based refractive index sensor, PDMS surface wettability modification and passive micromixers. The fabrication of fiber optic- based refractive index sensor has been improved by providing a 3D microfluidic environment to help float the fiber optic inside the microchannel. High sensitivity of 1509.3 nm/RIU was achieved for refractive index sensing of different Sodium Chloride solution concentrations. Fabrication of micro curvature structures on PDMS surface has increase its wettability into superhydrophobic state with water contact angle 157.3 °. Various shapes and designs of micromixers, including the different height of obstacles inside the microchannel have been fabricated and achieve a good mixing performance. In sum, a 3D microfabrication by grayscale photolithography technique has been developed, with functional applicability for fabrication of several microfluidic functions. 2018-11 Thesis http://eprints.uthm.edu.my/695/ http://eprints.uthm.edu.my/695/1/24p%20INTAN%20SUE%20LIANA%20ABDUL%20HAMID.pdf text en public phd doctoral Universiti Sains Malaysia Pusat Pengajian Kejuruteraan Elektrik dan Elektronik
institution	Universiti Tun Hussein Onn Malaysia
collection	UTHM Institutional Repository
language	English
topic	TJ1125-1345 Machine shops and machine shop practice
spellingShingle	TJ1125-1345 Machine shops and machine shop practice Abdul Hamid, Intan Sue Liana Development of three-dimensional (3D) grayscale Photolithography process for microfluidic curvature Structures
description	Three-dimensional (3D) microstructures can enhance the optical, electrical and mechanical properties of the microfluidic system. However, the 3D microfabrication is challenging when simultaneous control over fabrication of lateral and vertical dimensions is required. To achieve such control, grayscale photolithography technique has been comprehensively studied as an alternative to the current 3D microfabrication technique. Current techniques require highly sophisticated and PTTA expensive equipments, with slow point-to-point or layer-by-layer approach of pattern exposure. The proposed grayscale photolithography technique in this research has been used in realization of microstructures with height between 163.8 µm and 1108.7 µm in a single exposure through grayscale photomask. The grayscale photolithography technique developed in this study has been applied for realization of 3D microstructures in fiber optic-based refractive index sensor, PDMS surface wettability modification and passive micromixers. The fabrication of fiber optic- based refractive index sensor has been improved by providing a 3D microfluidic environment to help float the fiber optic inside the microchannel. High sensitivity of 1509.3 nm/RIU was achieved for refractive index sensing of different Sodium Chloride solution concentrations. Fabrication of micro curvature structures on PDMS surface has increase its wettability into superhydrophobic state with water contact angle 157.3 °. Various shapes and designs of micromixers, including the different height of obstacles inside the microchannel have been fabricated and achieve a good mixing performance. In sum, a 3D microfabrication by grayscale photolithography technique has been developed, with functional applicability for fabrication of several microfluidic functions.
format	Thesis
qualification_name	Doctor of Philosophy (PhD.)
qualification_level	Doctorate
author	Abdul Hamid, Intan Sue Liana
author_facet	Abdul Hamid, Intan Sue Liana
author_sort	Abdul Hamid, Intan Sue Liana
title	Development of three-dimensional (3D) grayscale Photolithography process for microfluidic curvature Structures
title_short	Development of three-dimensional (3D) grayscale Photolithography process for microfluidic curvature Structures
title_full	Development of three-dimensional (3D) grayscale Photolithography process for microfluidic curvature Structures
title_fullStr	Development of three-dimensional (3D) grayscale Photolithography process for microfluidic curvature Structures
title_full_unstemmed	Development of three-dimensional (3D) grayscale Photolithography process for microfluidic curvature Structures
title_sort	development of three-dimensional (3d) grayscale photolithography process for microfluidic curvature structures
granting_institution	Universiti Sains Malaysia
granting_department	Pusat Pengajian Kejuruteraan Elektrik dan Elektronik
publishDate	2018
url	http://eprints.uthm.edu.my/695/1/24p%20INTAN%20SUE%20LIANA%20ABDUL%20HAMID.pdf
_version_	1747830663167344640

Development of three-dimensional (3D) grayscale Photolithography process for microfluidic curvature Structures

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