Development of three-dimensional (3D) grayscale Photolithography process for microfluidic curvature Structures

Three-dimensional (3D) microstructures can enhance the optical, electrical and mechanical properties of the microfluidic system. However, the 3D microfabrication is challenging when simultaneous control over fabrication of lateral and vertical dimensions is required. To achieve such control, g...

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主要作者: Abdul Hamid, Intan Sue Liana
格式: Thesis
语言:English
出版: 2018
主题:
在线阅读:http://eprints.uthm.edu.my/695/1/24p%20INTAN%20SUE%20LIANA%20ABDUL%20HAMID.pdf
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