Structural and optical properties of silicon carbide quantum dots grown by very high frequency plasma enhanced chemical vapour deposition
This study presents the synthesis of Silicon Carbide Quantum Dots (SiC QDs) by Very High Frequency-Plasma Enhanced Chemical Vapour Deposition (VHF-PECVD) method. Si (100) was used as a substrate where the growth was performed at a much lower temperature (100°C) than previous work. Besides, the growt...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
2020
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/101977/1/HaezahMunyatiJusohMFS2020.pdf |
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