Structural and optical properties of silicon carbide quantum dots grown by very high frequency plasma enhanced chemical vapour deposition

This study presents the synthesis of Silicon Carbide Quantum Dots (SiC QDs) by Very High Frequency-Plasma Enhanced Chemical Vapour Deposition (VHF-PECVD) method. Si (100) was used as a substrate where the growth was performed at a much lower temperature (100°C) than previous work. Besides, the growt...

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Bibliographic Details
Main Author: Jusoh, Haezah Munyati
Format: Thesis
Published: 2020
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