Structural and optical properties of silicon carbide quantum dots grown by very high frequency plasma enhanced chemical vapour deposition

Structural and optical properties of silicon carbide quantum dots grown by very high frequency plasma enhanced chemical vapour deposition

This study presents the synthesis of Silicon Carbide Quantum Dots (SiC QDs) by Very High Frequency-Plasma Enhanced Chemical Vapour Deposition (VHF-PECVD) method. Si (100) was used as a substrate where the growth was performed at a much lower temperature (100°C) than previous work. Besides, the growt...

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書目詳細資料
主要作者:	Jusoh, Haezah Munyati
格式:	Thesis
語言:	English
出版:	2020
主題:	QC Physics
在線閱讀:	http://eprints.utm.my/id/eprint/101977/1/HaezahMunyatiJusohMFS2020.pdf
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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