Structural and optical properties of silicon carbide quantum dots grown by very high frequency plasma enhanced chemical vapour deposition

Structural and optical properties of silicon carbide quantum dots grown by very high frequency plasma enhanced chemical vapour deposition

This study presents the synthesis of Silicon Carbide Quantum Dots (SiC QDs) by Very High Frequency-Plasma Enhanced Chemical Vapour Deposition (VHF-PECVD) method. Si (100) was used as a substrate where the growth was performed at a much lower temperature (100°C) than previous work. Besides, the growt...

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书目详细资料
主要作者:	Jusoh, Haezah Munyati
格式:	Thesis
语言:	English
出版:	2020
主题:	QC Physics
在线阅读:	http://eprints.utm.my/id/eprint/101977/1/HaezahMunyatiJusohMFS2020.pdf
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