APA (7th ed.) Citation

Azali, M. M. (2022). Optimization of vhf-pecvd deposition parameters for silicon carbide film using in-situ and in-line gas phase analysis.

Chicago Style (17th ed.) Citation

Azali, Muhamad Muizzudin. Optimization of Vhf-pecvd Deposition Parameters for Silicon Carbide Film Using In-situ and In-line Gas Phase Analysis. 2022.

MLA (8th ed.) Citation

Azali, Muhamad Muizzudin. Optimization of Vhf-pecvd Deposition Parameters for Silicon Carbide Film Using In-situ and In-line Gas Phase Analysis. 2022.