Simulasi suis optik menggunakan teknologi MEMs

MEMs or known as MicroElectromechanical System is first introduced in 1980s. This technology is a combination of sensors, mechanical and electronic elements. All of them are unite in single basic material (silicon) and fabricated using a micro-fabrication system. Two micro fabrication techniques are...

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Bibliographic Details
Main Author: Adon, Mohamad Nazib
Format: Thesis
Published: 2006
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