Surface roughness and infra-red study of diamond-like carbon thin films
Diamond-like-carbon (DLC) thin films were prepared on silicon and glass substrates using direct current – plasma enhanced chemical vapour deposition (DC-PECVD) from a mixture of methane, hydrogen, and argon. Two sets of samples are successfully deposited with different substrate temperatures varied...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
2010
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| Online Access: | http://eprints.utm.my/id/eprint/16719/7/BibiAishahRoslanMFSA2010.pdf |
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