Surface roughness and infra-red study of diamond-like carbon thin films
Diamond-like-carbon (DLC) thin films were prepared on silicon and glass substrates using direct current – plasma enhanced chemical vapour deposition (DC-PECVD) from a mixture of methane, hydrogen, and argon. Two sets of samples are successfully deposited with different substrate temperatures varied...
Saved in:
Main Author: | Roslan, Bibi Aishah |
---|---|
Format: | Thesis |
Language: | English |
Published: |
2010
|
Subjects: | |
Online Access: | http://eprints.utm.my/id/eprint/16719/7/BibiAishahRoslanMFSA2010.pdf |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Similar Items
-
Conduction mechanisms in diamond-like carbon thin films prepared by PECVD method
by: Ab. Kaderld, Mohd. Azamnie
Published: (2010) -
The effect of substrate temperature on the structural and optical properties of diamond-like carbon thin film
by: Sarmid, Suriany
Published: (2007) -
UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD)
by: Ab. Rahman, Nur Alifah
Published: (2010) -
Structural and optical properties of diamond like carbon films using direct current plasma enhanced chemical vapor deposition
by: Ong, Wai Kit
Published: (2015) -
Tin Sulphide Nanostructures Synthesized By Chemical Bath Deposition For Near-Infra-Red Photodetector Applications
by: Mahdi, Mohamed Saleh
Published: (2017)