UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD)

A study of optical properties of Diamond-like Carbon Thin Films deposited by DC-PECVD. The films was deposited on the corning with the ratio of Hydrogen, H2 (97%) and Methane, CH4 (3%). The temperatures were varied between 200°C to 600°C while maintaining other important variables such as DC voltage...

全面介紹

Saved in:
書目詳細資料
主要作者: Ab. Rahman, Nur Alifah
格式: Thesis
語言:English
出版: 2010
主題:
在線閱讀:http://eprints.utm.my/id/eprint/16745/7/NurAlifahAbMFSA2010.pdf
標簽: 添加標簽
沒有標簽, 成為第一個標記此記錄!