Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD
Nanocrystalline silicon thin film is a promising material potentially used in the optoelectronic field due to its improved and unique properties. In this work, nanocrystalline silicon thin films were grown by using a 150MHz VHF-PECVD to study the effect of deposition times, substrate temperatures an...
Saved in:
| 主要作者: | |
|---|---|
| 格式: | Thesis |
| 語言: | English |
| 出版: |
2012
|
| 主題: | |
| 在線閱讀: | http://eprints.utm.my/id/eprint/32428/5/NurulAiniTarjudinMFS2012.pdf |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|