Re-crystallization of metallized silicon wafer with copper film by Q-switched Nd : YAG laser

The polycrystalline thin copper films on semiconductor substrates are of interest for many semiconductor devices. Hence the aim of this research is to recrystallize copper silicon thin film. In order to achieve this objective, the Q-switched Nd:YAG laser was employed as a source to re-crystallize th...

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Bibliographic Details
Main Author: Ahmed Alegaily, Fatouma Millad
Format: Thesis
Published: 2012
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