Re-crystallization of metallized silicon wafer with copper film by Q-switched Nd : YAG laser

Re-crystallization of metallized silicon wafer with copper film by Q-switched Nd : YAG laser

The polycrystalline thin copper films on semiconductor substrates are of interest for many semiconductor devices. Hence the aim of this research is to recrystallize copper silicon thin film. In order to achieve this objective, the Q-switched Nd:YAG laser was employed as a source to re-crystallize th...

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書目詳細資料
主要作者:	Ahmed Alegaily, Fatouma Millad
格式:	Thesis
語言:	English
出版:	2012
主題:	QC Physics
在線閱讀:	http://eprints.utm.my/id/eprint/33741/2/FatoumaMilladAhmedAlegailyMFS2012.pdf
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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