The structural and optical properties of hydrogenated amorphous carbon (a-C:H) thin films deposited using a direct current-plasma enhanced chemical vapour deposition (DC-PECVD) technique

The structural and optical properties of hydrogenated amorphous carbon (a-C:H) thin films deposited using a direct current-plasma enhanced chemical vapour deposition (DC-PECVD) technique

Hydrogenated amorphous carbon (a-C:H) thin films were deposited using the DC plasma enhanced chemical vapour deposition (DC-PECVD) technique. The effects of the deposition parameters (chamber pressure, electrode distance, CH4 flow rate, and substrate temperature) on the deposition rate were studied....

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書目詳細資料
主要作者:	Abu Bakar, Suriani
格式:	Thesis
語言:	English
出版:	2005
主題:	Unspecified
在線閱讀:	http://eprints.utm.my/id/eprint/35018/1/SurianiAbuBakar%20MFS2005.pdf
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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