Development of Argon fluoride (ArF) excimer laser ablation system and its diagnosis on optical materials

The growing interest in precise fabrication of micro and nano-structures such as optical components, sensors and devices make the conventional approach no longer satisfactory for micro scale structure. Excimer laser ablation is particularly well suited for material such as polymer because of their e...

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Bibliographic Details
Main Author: Mohd. Salleh, Mohd. Hazimin
Format: Thesis
Published: 2004
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