Sensing properties of copper oxide thin film upon exposure of methane gas in air
Application of p-type semiconductor copper oxide thin films as methane gas sensors in air was investigated. A series of copper oxide thin film had been prepared. The thin films were fabricated by using direct current (DC) sputtering technique on corning glass substrates at different deposition time...
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis |
| Language: | English |
| Published: |
2014
|
| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/50754/25/ZainatulIzzahABGhani_MFS2014.pdf |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|