Sensing properties of copper oxide thin film upon exposure of methane gas in air

Application of p-type semiconductor copper oxide thin films as methane gas sensors in air was investigated. A series of copper oxide thin film had been prepared. The thin films were fabricated by using direct current (DC) sputtering technique on corning glass substrates at different deposition time...

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Bibliographic Details
Main Author: Ab. Ghani, Zainatul Izzah
Format: Thesis
Language:English
Published: 2014
Subjects:
Online Access:http://eprints.utm.my/id/eprint/50754/25/ZainatulIzzahABGhani_MFS2014.pdf
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