Sensing properties of copper oxide thin film upon exposure of methane gas in air
Application of p-type semiconductor copper oxide thin films as methane gas sensors in air was investigated. A series of copper oxide thin film had been prepared. The thin films were fabricated by using direct current (DC) sputtering technique on corning glass substrates at different deposition time...
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主要作者: | Ab. Ghani, Zainatul Izzah |
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格式: | Thesis |
语言: | English |
出版: |
2014
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在线阅读: | http://eprints.utm.my/id/eprint/50754/25/ZainatulIzzahABGhani_MFS2014.pdf |
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