Sensing properties of copper oxide thin film upon exposure of methane gas in air
Application of p-type semiconductor copper oxide thin films as methane gas sensors in air was investigated. A series of copper oxide thin film had been prepared. The thin films were fabricated by using direct current (DC) sputtering technique on corning glass substrates at different deposition time...
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| 主要作者: | |
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| 格式: | Thesis |
| 語言: | English |
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2014
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| 主題: | |
| 在線閱讀: | http://eprints.utm.my/id/eprint/50754/25/ZainatulIzzahABGhani_MFS2014.pdf |
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