Structural and optical properties of diamond like carbon films using direct current plasma enhanced chemical vapor deposition
The amorphous diamond like carbon (a - DLC) thin films were deposited in 3 hours on glass substrates at the vacuum pressure, 8.0 x 10-2 Torr ; deposition pressure, 4.0 x 10-1 Torr and deposition temperatures, 300 – 500 °C by using direct current plasma enhanced chemical vapour deposition (DC - PECVD...
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis |
| Language: | English |
| Published: |
2015
|
| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/81448/1/OngWaiKitMFS2015.pdf |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|