Structural and optical properties of diamond like carbon films using direct current plasma enhanced chemical vapor deposition

The amorphous diamond like carbon (a - DLC) thin films were deposited in 3 hours on glass substrates at the vacuum pressure, 8.0 x 10-2 Torr ; deposition pressure, 4.0 x 10-1 Torr and deposition temperatures, 300 – 500 °C by using direct current plasma enhanced chemical vapour deposition (DC - PECVD...

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Main Author:	Ong, Wai Kit
Format:	Thesis
Language:	English
Published:	2015
Subjects:	QC Physics
Online Access:	http://eprints.utm.my/id/eprint/81448/1/OngWaiKitMFS2015.pdf
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spelling	my-utm-ep.814482019-08-23T05:18:46Z Structural and optical properties of diamond like carbon films using direct current plasma enhanced chemical vapor deposition 2015 Ong, Wai Kit QC Physics The amorphous diamond like carbon (a - DLC) thin films were deposited in 3 hours on glass substrates at the vacuum pressure, 8.0 x 10-2 Torr ; deposition pressure, 4.0 x 10-1 Torr and deposition temperatures, 300 – 500 °C by using direct current plasma enhanced chemical vapour deposition (DC - PECVD) system with the precursor gas, 1 % of methane, 39 % of hydrogen and 60 % of argon. The (a - DLC) films which have completely been deposited were post annealed for 3 hours in the tube furnace at 500 – 700 °C with nitrogen ambient to obtain the nitrogen doped amorphous diamond like carbon (a:N - DLC) films. The characterizations were studied by using X-Ray Diffractometer, Energy and Dispersive Analysis of X-Ray, Fourier Transform Infrared Spectrometer, UV / VIS / NIR Spectrophotometer and Photoluminescence Spectrometer. The annealed films are verified as amorphous structure as discovered by X-Ray Diffractometer. It was revealed that carbon, nitrogen, oxygen and silicon are emitting the x-ray energy spectra at 0.28 keV, 0.39 keV, 0.5 keV and 1.74 keV, respectively. The infrared absorptions have shown at 880 cm-1 as C-H bending bonds, 1100 and 1220 cm-1 as C-N stretching bonds, 1300 cm-1 as C-C stretching bonds, 1600 cm-1 as C=N stretching bonds and 2200 cm-1 as C=N stretching bonds for the films annealed from 500 °C to 700 °C. Stretching bond has been observed when annealed at 500 °C and C=N stretching bond has formed when annealed at 700 °C. Moreover the transmittance of (a:N - DLC) films was increasing from 24.9 % to 70.7 % when annealing temperature increased from 500 °C to 700 °C; transition changed from allowed indirect transition, r = 2 to forbidden direct transition, r = 3/2; the optical band gap decreases from 1.60 - 0.85 eV at 500 - 650 °C, but increases to 1.62 eV at 700°C. With the fixed excitation wavelength at 245 nm within the measurement range of 200 – 800 nm, the emission wavelengths were obtained at 290 nm and 393 nm which correspond to n - n* transition and violet emission transition, 4P01/2 4P½, respectively. 2015 Thesis http://eprints.utm.my/id/eprint/81448/ http://eprints.utm.my/id/eprint/81448/1/OngWaiKitMFS2015.pdf application/pdf en public http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:120167 masters Universiti Teknologi Malaysia Physics
institution	Universiti Teknologi Malaysia
collection	UTM Institutional Repository
language	English
topic	QC Physics
spellingShingle	QC Physics Ong, Wai Kit Structural and optical properties of diamond like carbon films using direct current plasma enhanced chemical vapor deposition
description	The amorphous diamond like carbon (a - DLC) thin films were deposited in 3 hours on glass substrates at the vacuum pressure, 8.0 x 10-2 Torr ; deposition pressure, 4.0 x 10-1 Torr and deposition temperatures, 300 – 500 °C by using direct current plasma enhanced chemical vapour deposition (DC - PECVD) system with the precursor gas, 1 % of methane, 39 % of hydrogen and 60 % of argon. The (a - DLC) films which have completely been deposited were post annealed for 3 hours in the tube furnace at 500 – 700 °C with nitrogen ambient to obtain the nitrogen doped amorphous diamond like carbon (a:N - DLC) films. The characterizations were studied by using X-Ray Diffractometer, Energy and Dispersive Analysis of X-Ray, Fourier Transform Infrared Spectrometer, UV / VIS / NIR Spectrophotometer and Photoluminescence Spectrometer. The annealed films are verified as amorphous structure as discovered by X-Ray Diffractometer. It was revealed that carbon, nitrogen, oxygen and silicon are emitting the x-ray energy spectra at 0.28 keV, 0.39 keV, 0.5 keV and 1.74 keV, respectively. The infrared absorptions have shown at 880 cm-1 as C-H bending bonds, 1100 and 1220 cm-1 as C-N stretching bonds, 1300 cm-1 as C-C stretching bonds, 1600 cm-1 as C=N stretching bonds and 2200 cm-1 as C=N stretching bonds for the films annealed from 500 °C to 700 °C. Stretching bond has been observed when annealed at 500 °C and C=N stretching bond has formed when annealed at 700 °C. Moreover the transmittance of (a:N - DLC) films was increasing from 24.9 % to 70.7 % when annealing temperature increased from 500 °C to 700 °C; transition changed from allowed indirect transition, r = 2 to forbidden direct transition, r = 3/2; the optical band gap decreases from 1.60 - 0.85 eV at 500 - 650 °C, but increases to 1.62 eV at 700°C. With the fixed excitation wavelength at 245 nm within the measurement range of 200 – 800 nm, the emission wavelengths were obtained at 290 nm and 393 nm which correspond to n - n* transition and violet emission transition, 4P01/2 4P½, respectively.
format	Thesis
qualification_level	Master's degree
author	Ong, Wai Kit
author_facet	Ong, Wai Kit
author_sort	Ong, Wai Kit
title	Structural and optical properties of diamond like carbon films using direct current plasma enhanced chemical vapor deposition
title_short	Structural and optical properties of diamond like carbon films using direct current plasma enhanced chemical vapor deposition
title_full	Structural and optical properties of diamond like carbon films using direct current plasma enhanced chemical vapor deposition
title_fullStr	Structural and optical properties of diamond like carbon films using direct current plasma enhanced chemical vapor deposition
title_full_unstemmed	Structural and optical properties of diamond like carbon films using direct current plasma enhanced chemical vapor deposition
title_sort	structural and optical properties of diamond like carbon films using direct current plasma enhanced chemical vapor deposition
granting_institution	Universiti Teknologi Malaysia
granting_department	Physics
publishDate	2015
url	http://eprints.utm.my/id/eprint/81448/1/OngWaiKitMFS2015.pdf
_version_	1747818334302240768

Structural and optical properties of diamond like carbon films using direct current plasma enhanced chemical vapor deposition

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